4

Chemical vapour deposition of tungsten films for metallization of integrated circuits

Year:
1984
Language:
english
File:
PDF, 915 KB
english, 1984
5

Tungsten films produced by selective deposition onto silicon wafers

Year:
1986
Language:
english
File:
PDF, 546 KB
english, 1986
6

CO2-laser-induced chemical vapour deposition of polycrystalline silicon from silane

Year:
1987
Language:
english
File:
PDF, 655 KB
english, 1987
9

Silver thin films deposited by magnetron sputtering

Year:
1994
Language:
english
File:
PDF, 453 KB
english, 1994
11

Handbook of Thin Films || Residual stresses in physically vapor-deposited thin films

Year:
2002
Language:
english
File:
PDF, 7.20 MB
english, 2002
19

Preface

Year:
1994
Language:
english
File:
PDF, 110 KB
english, 1994
20

Kinetics of laser thermal decomposition of trimethylamine alane

Year:
1995
Language:
english
File:
PDF, 409 KB
english, 1995
23

Preface

Year:
1996
Language:
english
File:
PDF, 91 KB
english, 1996
24

Absorption and decomposition of silane under infrared laser irradiation

Year:
1986
Language:
english
File:
PDF, 424 KB
english, 1986
25

Le nitrure de germanium (IV)

Year:
1980
File:
PDF, 1.10 MB
1980
26

Preface

Year:
1993
Language:
english
File:
PDF, 30 KB
english, 1993
29

Deposition and characterization of nanostructured metal/carbon composite films

Year:
2004
Language:
english
File:
PDF, 216 KB
english, 2004
33

Preface

Year:
2004
Language:
english
File:
PDF, 46 KB
english, 2004
36

Preface

Year:
2006
Language:
english
File:
PDF, 48 KB
english, 2006
37

Preface

Year:
2006
Language:
english
File:
PDF, 72 KB
english, 2006
39

Preface

Year:
2007
Language:
english
File:
PDF, 98 KB
english, 2007
40

2009 ICMCTF

Year:
2009
Language:
english
File:
PDF, 83 KB
english, 2009
42

2009 ICMCTF

Year:
2009
Language:
english
File:
PDF, 82 KB
english, 2009
46

Generation and evolution of residual stresses in physical vapour-deposited thin films

Year:
2001
Language:
english
File:
PDF, 139 KB
english, 2001
49

Preface

Year:
2002
Language:
english
File:
PDF, 36 KB
english, 2002